Parametric system-level models for position-control of novel electromagnetic free flight microactuator
| Author: | Arwed Schütz, Michael OlbrichGND, Siyang Hu, Christoph AmentORCiDGND, Tamara Bechtold |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/86959 |
| ISSN: | 0026-2714OPAC |
| Parent Title (English): | Microelectronics Reliability |
| Publisher: | Elsevier BV |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2021 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2021/05/20 |
| Tag: | Atomic and Molecular Physics, and Optics; Condensed Matter Physics; Electrical and Electronic Engineering; Electronic, Optical and Magnetic Materials; Safety, Risk, Reliability and Quality; Surfaces, Coatings and Films |
| Volume: | 119 |
| First Page: | 114062 |
| DOI: | https://doi.org/10.1016/j.microrel.2021.114062 |
| Institutes: | Fakultät für Angewandte Informatik |
| Fakultät für Angewandte Informatik / Institut für Informatik | |
| Fakultät für Angewandte Informatik / Institut für Informatik / Lehrstuhl für Ingenieurinformatik mit Schwerpunkt Regelungstechnik |
