Parametric system-level models for position-control of novel electromagnetic free flight microactuator
Author: | Arwed Schütz, Michael OlbrichGND, Siyang Hu, Christoph AmentORCiDGND, Tamara Bechtold |
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Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/86959 |
ISSN: | 0026-2714OPAC |
Parent Title (English): | Microelectronics Reliability |
Publisher: | Elsevier BV |
Type: | Article |
Language: | English |
Year of first Publication: | 2021 |
Release Date: | 2021/05/20 |
Tag: | Electrical and Electronic Engineering; Atomic and Molecular Physics, and Optics; Electronic, Optical and Magnetic Materials; Surfaces, Coatings and Films; Safety, Risk, Reliability and Quality; Condensed Matter Physics |
Volume: | 119 |
First Page: | 114062 |
DOI: | https://doi.org/10.1016/j.microrel.2021.114062 |
Institutes: | Fakultät für Angewandte Informatik |
Fakultät für Angewandte Informatik / Institut für Informatik | |
Fakultät für Angewandte Informatik / Institut für Informatik / Lehrstuhl für Ingenieurinformatik mit Schwerpunkt Regelungstechnik |