The influence of the ion flux density on the properties of molybdenum films deposited from the vapour phase under simultaneous argon ion irradiation

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Metadaten
Author:Wolfgang EnsingerORCiDGND
Frontdoor URLhttps://opus.bibliothek.uni-augsburg.de/opus4/107647
ISBN:978-0-444-82312-0OPAC
Parent Title (English):Small scale structures: proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for Sensors, Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayer of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995
Publisher:Elsevier
Place of publication:Amsterdam
Editor:N. F. de Rooij, J.-M. Moret, H. Schmidt, W. Göpel, A. L. Greer, K. Samwer, C. V. Thompson
Type:Conference Proceeding
Language:English
Year of first Publication:1996
Release Date:2023/11/22
First Page:54
Last Page:57
Series:European Materials Research Society Symposia Proceedings ; 275
DOI:https://doi.org/10.1016/B978-0-444-82312-0.50064-5
Institutes:Mathematisch-Naturwissenschaftlich-Technische Fakultät
Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik