Synthesis of buried silicon oxide layers by water plasma immersion implantation
| Author: | Ingo GroßhansGND, Kerstin VolzGND, Wolfgang EnsingerORCiDGND, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/123168 |
| ISSN: | 0168-583XOPAC |
| Parent Title (English): | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Publisher: | Elsevier BV |
| Place of publication: | Amsterdam |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 1999 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2025/07/17 |
| Volume: | 155 |
| Issue: | 1-2 |
| First Page: | 67 |
| Last Page: | 74 |
| DOI: | https://doi.org/10.1016/s0168-583x(99)00398-5 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
