Evaluation of thermal and growth stresses in heteroepitaxial AlN thin films formed on (0001) sapphire by pulsed laser ablation
| Author: | J. Keckes, S. Six, W. Tesch, R. Resel, Bernd RauschenbachORCiD |
|---|---|
| Frontdoor URL | https://opus.bibliothek.uni-augsburg.de/opus4/123529 |
| ISSN: | 0022-0248OPAC |
| Parent Title (English): | Journal of Crystal Growth |
| Publisher: | Elsevier BV |
| Type: | Article |
| Language: | English |
| Year of first Publication: | 2002 |
| Publishing Institution: | Universität Augsburg |
| Release Date: | 2025/07/22 |
| Volume: | 240 |
| Issue: | 1-2 |
| First Page: | 80 |
| Last Page: | 86 |
| DOI: | https://doi.org/10.1016/s0022-0248(02)00877-1 |
| Institutes: | Mathematisch-Naturwissenschaftlich-Technische Fakultät |
| Mathematisch-Naturwissenschaftlich-Technische Fakultät / Institut für Physik |
